This study explores the phase-controlled growth of few-layered 2H-MoTe2, 1T’-MoTe2, and 2H-/1T’-MoTe2 heterostructures and their impacts on metal contact properties. Cold-wall chemical vapor deposition (CW-CVD) with varying growth rates of MoOx and reaction temperatures with Te vapors enabled the growth of continuous thin films of either 1T’-MoTe2 or 2H-MoTe2 phases on two-inch sapphire substrates. This methodology facilitates the meticulous optimization of chemical vapor deposition (CVD) parameters, enabling the realization of phase-controlled growth of few-layered MoTe2 thin films and their subsequent heterostructures. The study further investigates the influence of a 1T’-MoTe2 intermediate layer on the electrical properties of metal contacts on few-layered 2H-MoTe2. Bi-layer Ti/Al contacts directly deposited on 2H-MoTe2 exhibited a Schottky behavior, indicating inefficient carrier transport. However, introducing a few-layered 1T’-MoTe2 intermediate layer between the metal and 2H-MoTe2 layers improved the contact characteristics significantly. The resulting Al/Ti/1T’-MoTe2/2H-MoTe2 contact scheme demonstrates Ohmic behavior with a specific contact resistance of around 1.7×10-4 Ω-cm2. This substantial improvement is attributed to the high carrier concentration of the 1T’-MoTe2 intermediate layer, facilitating increased tunneling events across the van der Waals gap and enhancing carrier transport between the metal and 2H-MoTe2.
